Mass Flow Controllers & Meters
Mass Flow Controllers (MFCs) are instruments which measure and control the flow of gases. MKS MFCs are available with either analog or digital communication, and with elastomer or metal seals. Analog MFCs are ideal for basic applications, offering high performance in a simple and cost effective package. Digital MFCs offer several advantages over analog MFCs - improved diagnostic capabilities, multi gas capability in a single package and multi range capability for reduced spares requirement and overall lower cost of ownership.