Flow Measurement, Control & Verification

Mass Flow Controllers & Meters

In Situ Flow Verifiers

Flow Ratio Controllers

Flow Related Products

Flow Products Power Supplies, Readouts, & Accessories

Mass Flow Controllers & Meters

Mass Flow Controllers (MFCs) are instruments which measure and control the flow of gases. MKS MFCs are available with either analog or digital communication, and with elastomer or metal seals. Analog MFCs are ideal for basic applications, offering high performance in a simple and cost effective package. Digital MFCs offer several advantages over analog MFCs - improved diagnostic capabilities, multi gas capability in a single package and multi range capability for reduced spares requirement and overall lower cost of ownership.

Categories

Thermal-based Mass Flow Controllers & Meters

Pressure-based Mass Flow Controllers

High-flow Mass Flow Controllers & Meters

Documents

MKS Instruments Flow Measurement & Control Product Line

MKS Mass Flow Control Accessories data sheet

Model-Based Solution for Multigas Mass Flow Control with Pressure Insensitivity

Critical Evaluation of Thermal Mass Flow Meters

Pressure Based Mass Flow Control for Ion Implant SDS Applications
 

Need help?

Contact an Applications Specialist by sending an email to MKS Flow Measurement & Control, or call 978-645-5500.

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