Mass Flow Controllers
Mass Flow Controller (MFC), Mass Flow Meter, and Flow Verifier Products - Digital, Analog, Thermal, Metal Sealed, Elastomer Sealed, Pressure-Based, Pressure-Insensitive, High Temperature, and Range Adjustable Units

Enabling our customer to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our mass flow controller (MFC) design philosophy. The MKS family of mass flow controllers measure and control the flow of critical gases in a wide variety of applications, such as semiconductor manufacturing, optical coatings, solar, and flat panel display manufacturing. With features, functionality and performances to meet virtually any need, customers can expect reduced cost of ownership and better tool and process performance.